Polarizational reflectometers for realization of the method of combined ellipsometric parameters

Petro I. Drozd; Leonid V. Poperenko; Vasiliy V. Prorok; Igor A. Shaykevich

doi:10.1117/12.197147

1 April 1995 Polarizational reflectometers for realization of the method of combined ellipsometric parameters

Petro I. Drozd, Leonid V. Poperenko, Vasiliy V. Prorok, Igor A. Shaykevich

Author Affiliations +

Optical Engineering, Vol. 34, Issue 4, (April 1995). https://doi.org/10.1117/12.197147

Abstract

The construction of two novel double-beam polarizational devices for the realization of the combined ellipsometric parameter method for solids and for liquids is described. As an example, the results of measurements based on this method for nonoxidic and oxidic surfaces of copper are presented.

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Petro I. Drozd, Leonid V. Poperenko, Vasiliy V. Prorok, and Igor A. Shaykevich "Polarizational reflectometers for realization of the method of combined ellipsometric parameters," Optical Engineering 34(4), (1 April 1995). https://doi.org/10.1117/12.197147

Published: 1 April 1995

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