Surface roughness measurement in the submicrometer range using laser scattering

S. H. Wang; Chenggen Quan; Cho Jui Tay; Huai Min Shang

doi:10.1117/1.602535

1 June 2000 Surface roughness measurement in the submicrometer range using laser scattering

S. H. Wang, Chenggen Quan, Cho Jui Tay, Huai Min Shang

Optical Engineering, Vol. 39, Issue 6, (June 2000). https://doi.org/10.1117/1.602535

A technique for measuring surface roughness in the submicrometer range is developed. The principle of the method is based on laser scattering from a rough surface. A telecentric optical setup that uses a laser diode as a light source is used to record the light field scattered from the surface of a rough object. The light intensity distribution of the scattered band, which is correlated to the surface roughness, is recorded by a linear photodiode array and analyzed using a singlechip microcomputer. Several sets of test surfaces prepared by different machining processes are measured and a method for the evaluation of surface roughness is proposed.

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S. H. Wang, Chenggen Quan, Cho Jui Tay, and Huai Min Shang "Surface roughness measurement in the submicrometer range using laser scattering," Optical Engineering 39(6), (1 June 2000). https://doi.org/10.1117/1.602535

Published: 1 June 2000

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