1 June 2007 Effect of replication on the groove shape of a sinusoidal holographic grating
Igor L. Zhurminsky, Rene Hauser
Author Affiliations +
Abstract
We study the changes in groove shape and depth that occur when holographic gratings are replicated in plastic. Specifically, we measure the groove profiles and spatial frequencies of electroplated metal shims made from sinusoidal holographic gratings, and also the same properties of the replicas made of polymethylmethacrylate (also metal shims). Nine samples are studied that have spatial frequencies in the range 600 to 2000 mm-1. The shims of the replicated gratings have up to 30% shallower grooves and 13% lower diffraction efficiencies than the shims of the originals. The maximum measured diffraction efficiency for shims of the original gratings having 525-to 620-mm-1 spatial frequencies correspond to a 0.22-μm groove depth, which agrees with the calculated value. We use this information to modify the groove shapes on the holographic gratings to make better plastic replicas.
©(2007) Society of Photo-Optical Instrumentation Engineers (SPIE)
Igor L. Zhurminsky and Rene Hauser "Effect of replication on the groove shape of a sinusoidal holographic grating," Optical Engineering 46(6), 063003 (1 June 2007). https://doi.org/10.1117/1.2744387
Published: 1 June 2007
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KEYWORDS
Diffraction gratings

Spatial frequencies

Diffraction

Nickel

Holography

Photoresist materials

Polymethylmethacrylate

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