High-speed inline profiler using a modified Fourier transform method for measuring integrated circuit surface profiles

Takeshi Nakazawa; José Sasián; Francy K. Abraham

doi:10.1117/1.3574399

1 May 2011 High-speed inline profiler using a modified Fourier transform method for measuring integrated circuit surface profiles

Takeshi Nakazawa, José Sasián, Francy K. Abraham

Author Affiliations +

Optical Engineering, Vol. 50, Issue 5, 053603 (May 2011). https://doi.org/10.1117/1.3574399

Abstract

We propose a high-speed surface profiler using a modified Fourier transform profilometry (FTP) approach. Our system geometry is different from a conventional profiler in that the fringe-projection lens and the imaging lens are at different heights from a reference plane. FTP computer simulation and experimental data are provided that supports our theoretical development. Our profiler provides a 1σ rms error of about 4 μm for an integrated circuit chip sample in an area of 14 mm × 6.5 mm with a 0.13 second data acquisition time. It is shown that our theoretical derivation is suitable for a micrometer scale object measurement.

©(2011) Society of Photo-Optical Instrumentation Engineers (SPIE)

Citation Download Citation

Takeshi Nakazawa, José Sasián, and Francy K. Abraham "High-speed inline profiler using a modified Fourier transform method for measuring integrated circuit surface profiles," Optical Engineering 50(5), 053603 (1 May 2011). https://doi.org/10.1117/1.3574399

Published: 1 May 2011

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available