Diffractive characterization of the vibrational state of an array of microcantilevers

Alexander Cuadrado; Jordi Agusti; Gabriel Abadal; Javier Alda

doi:10.1117/1.OE.52.9.091717

30 April 2013 Diffractive characterization of the vibrational state of an array of microcantilevers

Alexander Cuadrado, Jordi Agusti, Gabriel Abadal, Javier Alda

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Optical Engineering, Vol. 52, Issue 9, 091717 (April 2013). https://doi.org/10.1117/1.OE.52.9.091717

Abstract

The vibrational state of an array of microcantilevers piezoelectrically excited has been characterized analyzing the far-field diffraction pattern produced by the structure. A model based on the definition of a complex reflectivity window has been developed to fully understand the dynamic of the elements and the diffraction pattern produced by them. This model is parameterized by the driving voltage of the excitation, the vibration mode, and the phase correlation among cantilevers. An experimental set-up has been developed to register the far-field diffraction patterns, avoiding some undesired reflections from the surrounding structures. The experimental results have been fitted with those obtained from the simulation. This fitting allows for identifying the vibration mode and the phase relation among cantilevers.

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Alexander Cuadrado, Jordi Agusti, Gabriel Abadal, and Javier Alda "Diffractive characterization of the vibrational state of an array of microcantilevers," Optical Engineering 52(9), 091717 (30 April 2013). https://doi.org/10.1117/1.OE.52.9.091717

Published: 30 April 2013

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