This work systematically reports on the preparation of Nd^3  +-doped silicate glass (NDSG) and its waveguide structure, as well as the optimization effects of annealing procedures on the waveguide performances. The NDSG was synthesized by the melt-quenching technique. Its absorption spectrum and photoluminescence properties were recorded by a JASCO V-570 spectrophotometer and an Edinburgh FLS920P fluorescence spectrometer, respectively. A planar optical waveguide was fabricated in the NDSG using 0.4-MeV proton implantation at a fluence of 8  ×  10¹⁶  ions  cm^−  2. Its optical properties were optimized by 1-h stepwise annealing treatments with the temperature range of 260°C to 410°C. The distribution of the refractive index and the profile of near-field intensity were investigated by the prism-coupling equipment and the end-face coupling system, respectively. The obtained results show the prospects for using NDSG waveguides in planar photonic devices.