17 August 2021 Measuring large amplitude surface figure error using coordinate metrology
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Abstract

Advances in optical testing are as important as advances in fabrication because one can make only what one can measure. A high-precision metrology capability is utilized to close the gap between interferometric testing and lower precision metrology, laser radar, or contact-probe-based coordinate measuring machines (CMM) to accurately measure surfaces with large form error. This nearly universal optical testing method employs a precision CMM equipped with a non-contact, confocal probe. This technique was developed to characterize and align a broad spectrum of optical surfaces including ones with high slopes that are nearly impossible to measure using traditional interferometric testing without custom-made optics. Optical components covering a wide range of prescriptions, such as large convex conics, high-sloped aspherics, grazing-incidence x-ray optics, and highly deformed flats, were successfully measured. The resulting data were processed using custom-developed routines to determine the optic’s alignment, the departure from design surface, and the as-built prescription parameters. This information was used to verify and guide the development and fabrication of novel optics.

© 2021 Society of Photo-Optical Instrumentation Engineers (SPIE) 0091-3286/2021/$28.00 © 2021 SPIE
Manal Khreishi, Raymond G. Ohl, Ryan S. McClelland, Ron S. Shiri, Tilak Hewagama, Shahid Aslam, Melville P. Ulmer, Edgar R. Canavan, and Rongguang Liang "Measuring large amplitude surface figure error using coordinate metrology," Optical Engineering 60(8), 084103 (17 August 2021). https://doi.org/10.1117/1.OE.60.8.084103
Received: 16 February 2021; Accepted: 3 August 2021; Published: 17 August 2021
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Cited by 1 scholarly publication.
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KEYWORDS
Metrology

Mirrors

Optical engineering

X-ray optics

Optical testing

Silicon

Semiconducting wafers

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