Based on the ITO-HfO2-graphene stacked layers, a modulator that can achieve independent modulation of TE mode and TM mode within a single silicon waveguide is proposed. Graphene and ITO are employed as electrodes of graphene-HfO2-ITO capacitor. Under applied voltage, carriers accumulate within the 5 nm thick ITO film, leading to a modification of the optical dielectric constant. Using ITO’s epsilon-near-zero behavior and its sensitivity to optical polarization, a modulation depth (MD) of no |
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