Mr. Adam Pranda Profile

Adam Pranda

at Univ of Mayland College Park

SPIE Involvement:

Author

Publications (3)

Proceedings Article | 26 March 2019 Paper

Oxygen effects in thin films for high-resolution , 3-color lithography

Sandra Gutierrez Razo, Nikolaos Liaros, Adam Pranda, Gottlieb Oehrlein, John Fourkas, John Petersen

Proceedings Volume 10958, 1095814 (2019) https://doi.org/10.1117/12.2516544

KEYWORDS: Oxygen, Thin films, Photoresist materials, Polymerization, Lithography, Optical lithography, Glasses, Bioalcohols, Visible radiation, Water

Read Abstract +

Proceedings Article | 19 March 2018 Paper

Thin films for high-resolution, 3-color lithography

Sandra Gutierrez Razo, Adam Pranda, Nikolaos Liaros, Samuel Cohen, John Fourkas, Gottlieb Oehrlein, Hannah Ogden, Amy Mullin, Steven Wolf, Daniel Falvey, John Petersen

Proceedings Volume 10584, 1058418 (2018) https://doi.org/10.1117/12.2299681

KEYWORDS: Visible radiation, Thin films, Lithography, Semiconducting wafers, Photoresist materials, Silicon, Etching, Optical lithography, Resistance, Plasma

Read Abstract +

Proceedings Article | 19 March 2018 Paper

The state of the art in multicolor visible photolithography

Nikolaos Liaros, Zuleykhan Tomova, Sandra Gutierrez Razo, Samuel Cohen, John Fourkas, Steven Wolf, Matthew Thum, Daniel Falvey, Hannah Ogden, Amy Mullin, Adam Pranda, Gottlieb Oehrlein, John Petersen

Proceedings Volume 10584, 1058407 (2018) https://doi.org/10.1117/12.2297653

KEYWORDS: Photoresist materials, Optical lithography, Lithography, Thin films, Absorption, Molecules, Microscopy, Stimulated emission depletion microscopy, Etching, Point spread functions

Read Abstract +

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years