Mr. Adriaan van Zwol Profile

Adriaan van Zwol

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Publications (3)

Proceedings Article | 24 November 2023 Presentation

High power optics in the semiconductor industry

Adriaan van Zwol

Proceedings Volume PC12726, PC127260C (2023) https://doi.org/10.1117/12.2682749

KEYWORDS: Semiconductors, Industry, Optical semiconductors, Extreme ultraviolet, Carbon dioxide lasers, Semiconductor lasers, Mirrors, Laser marking, Laser damage threshold

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Proceedings Article | 26 June 2003 Paper

Tool ranking using aberration measurements in a high-volume manufacturing facilility

Cesar Garza, Scott Warrick, Gary Seligman, Lena Zavyalova, Adrian van Zwol, James Foster

Proceedings Volume 5040, (2003) https://doi.org/10.1117/12.485428

KEYWORDS: Scanning electron microscopy, Scanners, Image processing, Transistors, Manufacturing, Monochromatic aberrations, High volume manufacturing, Optical lithography, Spherical lenses, Semiconductors

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Proceedings Article | 14 September 2001 Paper

Application of the aberration ring test (ARTEMIS) to determine lens quality and predict its lithographic performance

Marco Moers, Hans van der Laan, Mark Zellenrath, Wim de Boeij, Neil Beaudry, Kevin Cummings, Adriaan van Zwol, Arthur Brecht, Rob Willekers

Proceedings Volume 4346, (2001) https://doi.org/10.1117/12.435676

KEYWORDS: Lithography, Reticles, Monochromatic aberrations, Spherical lenses, Scanning electron microscopy, Scanners, Phase shifts, Deep ultraviolet, Semiconducting wafers, Feature extraction

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