Dr. Agnes Roussy
at École des Mines de Saint-Étienne
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 4 September 2018 Paper
S. Bourzgui, G. Georges, A. Roussy, J. Blue, E. Faivre, J. Pinaton
Proceedings Volume 10750, 107500C (2018) https://doi.org/10.1117/12.2320966
KEYWORDS: Chemical mechanical planarization, Polishing, Interferometry, Diffraction, Semiconducting wafers, Signal detection, Process control, Light scattering, Scattering

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