Mr. Akinori Kawamura Profile

Akinori Kawamura

at TASMIT Inc

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Publications (2)

Proceedings Article | 22 February 2021 Presentation + Paper

Improvement of EPE measurement accuracy on ADI wafer, the method of using machine learning trained with CAD

Yosuke Okamoto, Shinichi Nakazawa, Akinori Kawamura, Taihei Mori, Kotaro Maruyama, Seul-Ki Kang, Yuichiro Yamazaki

Proceedings Volume 11611, 116111W (2021) https://doi.org/10.1117/12.2584709

KEYWORDS: Machine learning, Semiconducting wafers, Computer aided design, Scanning electron microscopy, Metrology, Data modeling, Solid modeling, Image segmentation, Inspection, Feature extraction

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Proceedings Article | 20 March 2020 Paper

Contour extraction algorithm for edge placement error measurement using machine learning

Yosuke Okamoto, Shinichi Nakazawa, Akinori Kawamura, Tsugihiko Haga, Taihei Mori, Kotaro Maruyama, Seul-Ki Kang, Yuichiro Yamazaki

Proceedings Volume 11325, 113252A (2020) https://doi.org/10.1117/12.2553663

KEYWORDS: Scanning electron microscopy, Computer aided design, Machine learning, Edge detection, Precision measurement

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