Highly sensitive trace-gas sensors are required in a large range of applications, such as biological, environmental, industrial, and fundamental physics. Photoacoustic spectroscopy has the advantages of compactness and robustness and is characterized by a high degree of flexibility in its configuration, in particular in the selection of the laser source and the transducer. Here we report the experimental characterization of new silicon-based Micro electro-mechanical systems (MEMS) structures to be applied as acoustic-to-voltage transducers in a photo-acoustic-based sensor. In our setup, a 4.5 μm continuous wave quantum cascade laser is used to address strong N2O roto-vibrational transition, and the detection of MEMS oscillations is performed via a balanced interferometric readout.
In the race toward increasingly high-performance trace-molecule sensors, one of the most significant steps forward in the last decade for photoacoustic sensors was their combination with high-finesse optical cavities. Validated with different configurations, this technique demonstrated enhanced sensitivities below the part-per-trillion level (ppt) and record dynamic ranges. Here we present our advanced cantilever-based photoacoustic setup, based on a custom-made silicon cantilever embedded in a doubly-resonant configuration. The combination of a high-quality-factor acoustic resonator and a high-finesse optical cavity allows a final sensitivity enhancement by several orders of magnitude. The sensor was tested on strong N2O transitions around 4.5 μm wavelength with a continuous-wave quantum cascade laser.
We describe the development and the first characterization of a compact trace-gas sensor based on cantilever photoacoustic spectroscopy (CEPAS). The sensor was characterized in order to find the optimal operating parameters (pressure, molecule absorption line and laser modulated frequency). N2O was selected as test molecule. A quality factor of 200 at 10 mbar of cell pressure were determined. Furthermore, the first test measurements showed a minimum detection level of hundreds of ppb with integration time of 30 ms.
This paper presents design, modeling, and fabrication of a crab-shape microphone using silicon-on-isolator (SOI) wafer. SOI wafer is used to prevent the additional deposition of sacrificial and diaphragm layers. The holes have been made on diaphragm to prevent back plate etching. Dry etching is used for removing the sacrificial layer, because wet etching causes adhesion between the diaphragm and the back plate. Crab legs around the perforated diaphragm allow for improving the microphone performance and reducing the mechanical stiffness and air damping of the microphone. In this structure, the supply voltage is decreased due to the uniform deflection of the diaphragm due to the designed low-K (spring constant) structure. An analytical model of the structure for description of microphone behavior is presented. The proposed method for estimating the basic parameters of the microphone is based on the calculation of the spring constant using the energy method. The microphone is fabricated using only one mask to pattern the crab-shape diaphragm, resulting in a low-cost and easy fabrication process. The diaphragm size is 0.3 mm×0.3 mm, which is smaller than the conventional microelectromechanical systems capacitive microphone. The results show that the analytical equations have a good agreement with measurement results. The device has the pull-in voltage of 14.3 V, a resonant frequency of 90 kHz, an open-circuit sensitivity of 1.33 mV/Pa under bias voltage of 5 V. Comparing with previous works, this microphone has several advantages: SOI wafer decreases the fabrication process steps, the microphone is smaller than the previous works, and crab-shape diaphragm improves the microphone performances.
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