Mr. Alex Ren Profile

Alex Ren

at ChangXin Memory Technologies Inc

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Publications (1)

Proceedings Article | 28 April 2023 Poster + Paper

Comprehensive investigation on improvement of local CDU for sub-20nm DRAM devices

Zhong Zhang, Yang Zhang, Liang Zhu, Yi Cheng, Hui Dong, Kaige Gong, Jingjing Zhao, Jun Xu, Alex Ren

Proceedings Volume 12494, 124941H (2023) https://doi.org/10.1117/12.2657250

KEYWORDS: Photoresist materials, Source mask optimization, Reticles, Etching, Light sources and illumination, Optical lithography, Lithography, Image enhancement, Phase shifts, Nanoimprint lithography, Deep ultraviolet

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