Dr. Alexander Lash
at Institute of Spectroscopy RAS
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 28 September 2021 Poster + Presentation
Mikhail Krivokorytov, Konstantin Koshelev, Alexander Vinokhodov, Oleg Yakushev, Vladimir Ivanov, Vladimir Krivtsun, Alexander Lash, Vyacheslav Medvedev, Vladimir Gubarev, Denis Glushkov, Samir Ellwi, Eugene Gorsky, Alexey Kiselev
Proceedings Volume 11854, 118541A (2021) https://doi.org/10.1117/12.2601008
KEYWORDS: Extreme ultraviolet, Light sources, Statistical analysis, Plasma, Metals, Magnetism, Ions, Silicon, Scanning electron microscopy, Pulsed laser operation

Proceedings Article | 3 October 2018 Paper
Konstantin Koshelev, Alexander Vinokhodov, Oleg Yakushev, Alexey Yakushkin, Dimitri Abramenko, Alexander Lash, Mikhail Krivokorytov, Yuri Sidelnikov, Vladimir Ivanov, Vladimir Krivtsun, Vyacheslav Medvedev, Denis Glushkov, Pavel Seroglazov, Samir Ellwi, Rainer Lebert
Proceedings Volume 10809, 108091Q (2018) https://doi.org/10.1117/12.2501812
KEYWORDS: Lithium, Extreme ultraviolet, Tin, Pulsed laser operation, Metrology, Extreme ultraviolet lithography, Super resolution microscopy, Scanners, Light sources, Liquids

SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Advertisement
Advertisement
Back to Top