Mr. Amir Wachs Profile

Amir Wachs

at Applied Materials

SPIE Involvement:

Author

Publications (3)

Proceedings Article | 5 July 2000 Paper

Characterization of leveling modes on i-line stepper

Amir Wachs, David Cohen, Ayelet Margalit-Ilovich

Proceedings Volume 4000, (2000) https://doi.org/10.1117/12.389076

KEYWORDS: Semiconducting wafers, Metals, Sensors, CCD image sensors, Optical lithography, Scanning electron microscopy, Image sensors, CCD cameras, Imaging systems, Halogens

Read Abstract +

Proceedings Article | 2 June 2000 Paper

Modular monitoring for the photolithography environment

Amir Wachs

Proceedings Volume 3998, (2000) https://doi.org/10.1117/12.386509

KEYWORDS: Optical lithography, Environmental monitoring, Contamination, Semiconductors, Statistical analysis, Tolerancing, Environmental sensing, Process engineering, Overlay metrology, Manufacturing

Read Abstract +

Proceedings Article | 14 June 1999 Paper

Effect of the control of global planarity of intermetal dielectric layers on the lithographic process window

Shani Keysar, Leah Markowitz, Corin Ben-Gigi, Rama Tweg, Ayelet Margalit-Ilovich, Avishai Kepten, Amir Wachs, Roey Shaviv

Proceedings Volume 3677, (1999) https://doi.org/10.1117/12.350815

KEYWORDS: Lithography, Metals, Dielectrics, Semiconducting wafers, Scanning electron microscopy, Chemical mechanical planarization, Optical lithography, Wafer testing, Hydrogen, Chemistry

Read Abstract +

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years