Nanoparticle films of crystalline WO3, designed for gas sensing applications, were deposited on alumina substrates by reactive gas deposition. H2S, ethanol vapour, and binary mixtures of ethanol/H2S, ethanol/NO2 and H2S/NO2 were used in different concentrations for testing the performance of the sensor device. The sensor was operated in dynamic mode by modulating its temperature between 150 and 250 °C. Coefficients were extracted by applying Fast Fourier Transform (FFT) and Discrete Wavelet Transform (DWT) methods to the dynamic resistance response of the sensor. These coefficients were then used as inputs for pattern recognition methods to extract both quantitative (concentration) and qualitative (chemical selectivity) information about the test gases. After sensor calibration, it was possible to detect as little as 200 ppb of ethanol and 20 ppb of H2S with good accuracy. Furthermore, ethanol and H2S could be detected with good sensitivity and selectivity in the presence of both reducing and oxidising gases.
WO3 nanoparticles were generated by gas deposition. Deposits on Al substrates were studied by scanning force microscopy operated in the intermittent-contact (tapping) mode. At low surface coverage (< 0.5 %), we observed single nanoparticles with a mean size of ~ 1.5 nm. An increase of the amount of particles led to agglomerates, which appeared at surface coverages as low as 2 to 4 %. At full coverage the mean agglomerate size was ~ 5 nm. This value did not change as the sample was annealed at temperatures up to 250 °C. The size distribution of the agglomerates was found to be log-normal, i.e., similar to the size distribution of the gas-phase nanoparticles forming the deposit. For explaining the obtained log-normal size distribution of the agglomerates simulations of the agglomeration process were also carried out.
Nanoparticles can be generated by several different gas phase methods, such as gas deposition, laser-assisted chemical vapor deposition, and laser ablation. Some of the most important aspects - such as size-distribution, structure, and chemical composition of the generated nanoparticles (specifically W and WO3) - are presented and compared. WO3 nanoparticle films were deposited by an advanced gas deposition technique and were tested for sensor applications. Two different sensor devices were fabricated: Firstly, a thin Au-WO3 nanoparticle sandwich film was constructed, and conductance fluctuations of the Au film were measured as the sensor was exposed to alcohol vapor. Secondly,
conductivity changes of a thick WO3 nanoparticle film were detected as it was exposed to test gases (H2S, NO2, and CO).
Conduction noise measurements were carried out in the 0.3 to 45 Hz frequency range on Au films covered by a thin layer of tungsten trioxide (WO3) nanoparticles. Exposing the films to alcohol vapor resulted in a gradually increased noise intensity which went through a maximum after an exposure time of the order of 15 min. The maximum noise intensity could increase by several orders of magnitude above the initial level. Longer exposure times made the noise decrease and approach its original value. This effect was not observed in the absence of WO3 nanoparticles. The phenomenon is discussed in terms of a new invasion noise model in which the noise is related to the insertion and extraction of mobile chemical species.
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