A multi-view scanning method is suggested to assess a complicated surface relief by white light interferometer.
Peculiarities of the method are demonstrated on a special object in the form of quadrangular pyramid cavity, which is
formed at measurement of micro-hardness of materials using a hardness gauge. An algorithm of the joint processing of
multi-view scanning results is developed that allows recovering correct relief values. Laser ablation craters were studied
experimentally, and their relief was recovered using the developed method. It is shown that the multi-view scanning
reduces ambiguity when determining the local depth of the laser ablation craters micro relief. Results of experimental
studies of the multi-view scanning method and data processing algorithm are presented.
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