Dr. Li-Ji Lyu Profile

Dr. Li-Ji Lyu

Chief Scientist at MKS Instruments Inc

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Publications (2)

Proceedings Article | 14 November 2013 Paper

Laser-induced damage resistance of 266nm AR coatings

Byungil Cho, Andy Lyu, Mark Feldman

Proceedings Volume 8885, 888524 (2013) https://doi.org/10.1117/12.2030738

KEYWORDS: Antireflective coatings, Silica, Laser induced damage, Absorption, Polishing, Coating, Surface roughness, Resistance, Surface finishing, Ultraviolet coatings

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Proceedings Article | 4 December 2012 Paper

Laser-induced damage resistance of UV coatings on fused silica and CaF2

Byungil Cho, Andy Lyu, Mark Feldman

Proceedings Volume 8530, 853029 (2012) https://doi.org/10.1117/12.2007286

KEYWORDS: Silica, Laser induced damage, Coating, Surface roughness, Absorption, Polishing, Antireflective coatings, Resistance, Ultraviolet coatings, Surface finishing

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