Dr. Anthony M. Keen Profile

Dr. Anthony M. Keen

Technology Manager - EUV at Edwards Ltd

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Publications (3)

Proceedings Article | 8 April 2011 Paper

Considerations for cost of ownership in EUV lithography

Anthony Keen, Christopher Bailey, Jos Donders, Neil Condon

Proceedings Volume 7969, 79693B (2011) https://doi.org/10.1117/12.894707

KEYWORDS: Extreme ultraviolet lithography, Semiconductors, Vacuum equipment, Semiconducting wafers, Semiconductor manufacturing, Lithography, Optical lithography, Nitrogen, Manufacturing, Data centers

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Proceedings Article | 4 April 2007 Paper

An analysis of EUV-resist outgassing measurements

Kim Dean, Iwao Nishiyama, Hiroaki Oizumi, Anthony Keen, Heidi Cao, Wang Yueh, Takeo Watanabe, Paolo Lacovig, Luca Rumiz, Gregory Denbeaux, Julia Simon

Proceedings Volume 6519, 65191P (2007) https://doi.org/10.1117/12.712379

KEYWORDS: Extreme ultraviolet, Extreme ultraviolet lithography, Synchrotrons, Contamination, Mass spectrometry, Molecules, Mirrors, Analytical research, Calibration, EUV optics

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Proceedings Article | 20 May 2004 Paper

Short-term vacuum outgassing measurements with application to load-locks and photoresist

Anthony Keen, Neil Condon

Proceedings Volume 5374, (2004) https://doi.org/10.1117/12.557209

KEYWORDS: Metals, Semiconducting wafers, Extreme ultraviolet, Extreme ultraviolet lithography, Contamination, Lithography, Mirrors, Silicon, Carbon, Projection systems

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