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Aris W. W. Chen
at Taiwan Semiconductor Manufacturing Co Ltd
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Publications (1)
Proceedings Article | 4 December 2008 Paper
Advanced inspection methodologies for detection and classification of killer substrate defects
Aris Chen, Victor Huang, Sophie Chen, C. J. Tsai, Kenneth Wu, Haiping Zhang, Kevin Sun, Jason Saito, Henry Chen, Debbie Hu, Ming Li, William Shen, Uday Mahajan
Proceedings Volume 7140, 71400W (2008) https://doi.org/10.1117/12.804558
KEYWORDS: Semiconducting wafers, Inspection, Particles, Light scattering, Coating, Polishing, Scattering, Scanning electron microscopy, Crystals, Defect inspection
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