Dr. Ayse Akbalik Profile

Dr. Ayse Akbalik

at CEA-LETI

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Publications (1)

Proceedings Article | 24 March 2009 Paper

An inverse ellipsometric problem for thin film characterization: comparison of different optimization methods

Ayşe Akbalık, Sébastien Soulan, Jean-Hervé Tortai, David Fuard, Issiaka Kone, Jérôme Hazart, Patrick Schiavone

Proceedings Volume 7272, 72723S (2009) https://doi.org/10.1117/12.814118

KEYWORDS: Thin films, Refractive index, Metrology, Inspection, Process control, Optical lithography, Current controlled current source, Spectroscopy, Polymer thin films, Polymers

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