Bernardo Micali
at STMicroelectronics
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 20 March 2020 Paper
A. Bordogna, S. Seminato, A. Corno, A. Beccalli, L. Motta, G. Pistone, F. Ferrario, P. Piacentini, B. Micali, P. Sharma, L. Bouckou, P. Parisi, T. Groos
Proceedings Volume 11325, 113250I (2020) https://doi.org/10.1117/12.2551890
KEYWORDS: Inspection, Lithography, Defect detection, Defect inspection, Manufacturing, Process control

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