Ms. Bethany Levenson Profile

Bethany Levenson

at Izentis LLC

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Publications (2)

Proceedings Article | 10 April 2024 Presentation

Metrology challenges for fabrication of high aspect ratio, nano scale x-ray diffraction gratings

Mark Schattenburg, Ralf Heilmann, Alexander Bruccoleri, Vittorio Colicci, Bethany Levenson, George Antonelli, Nicholas Keller

Proceedings Volume 12955, 129550Z (2024) https://doi.org/10.1117/12.3010409

KEYWORDS: Diffraction gratings, X-rays, Semiconducting wafers, X-ray diffraction, Metrology, Fabrication, Etching, Spectrometers, Spectral resolution, Reflection

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Proceedings Article | 23 August 2021 Presentation + Paper

Manufacture and performance of blazed soft x-ray transmission gratings for Arcus and Lynx

Ralf Heilmann, Alexander Bruccoleri, Jungki Song, Bethany Levenson, Brian Smallshaw, Mallory Whalen, Alan Garner, Sarah Trowbridge Heine, Herman Marshall, Matthew Cook, James Gregory, Renee Lambert, Dmitri Shapiro, Douglas Young, Eric Gullikson, Tomoyuki Nonaka, Akimi Uchida, Manuel Quijada, Ed Hertz, Peter Cheimets, Randall Smith, Mark Schattenburg

Proceedings Volume 11822, 1182215 (2021) https://doi.org/10.1117/12.2594951

KEYWORDS: Diffraction gratings, Computed tomography, Semiconducting wafers, X-rays, Diffraction, Etching, Deep reactive ion etching, Photomasks, Optical alignment, X-ray diffraction

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