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Bill Ghiorso
Engineer at Lawrence Berkeley National Lab
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Author
Publications (2)
Proceedings Article | 1 April 2013 Paper
Commissioning an EUV mask microscope for lithography generations reaching 8 nm
Kenneth Goldberg, Iacopo Mochi, Markus Benk, Arnaud Allezy, Michael Dickinson, Carl Cork, Daniel Zehm, James Macdougall, Erik Anderson, Farhad Salmassi, Weilun Chao, Vamsi Vytla, Eric Gullikson, Jason DePonte, M. S. Gideon Jones, Douglas Van Camp, Jeffrey Gamsby, William Ghiorso, Hanjing Huang, William Cork, Elizabeth Martin, Eric Van Every, Eric Acome, Veljko Milanovic, Rene Delano, Patrick Naulleau, Senajith Rekawa
Proceedings Volume 8679, 867919 (2013) https://doi.org/10.1117/12.2011688
KEYWORDS: Photomasks, Mirrors, Microscopes, Extreme ultraviolet, Fiber optic illuminators, Lenses, Reflectivity, Charge-coupled devices, Coating, Extreme ultraviolet lithography
Proceedings Article | 25 July 2008 Paper
LBNL fiber positioners for wide-field spectroscopy
Proceedings Volume 7018, 701850 (2008) https://doi.org/10.1117/12.801673
KEYWORDS: Actuators, Galactic astronomy, Computer programming, Switches, Calibration, Cameras, Optical fibers, Telescopes, Spectroscopy, Magnetism
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