We propose an analytical nonlinear hysteresis model of the bimorph beam bending piezoelectric actuator for a deformable mirror system. An explicit solution is derived from the analytic method based on the nonlinear elasticity. As an application example, the nonlinear hysteresis behaviors of a bimorph beam bending piezoelectric actuator, which is sandwich compounds consisting of a lower and an upper piezoelectric ceramic (PZT8-50) layer and a middle layer made of the aluminum alloy, are examined with the model. The numerical calculations based on the analytical solution are presented. The numerical simulations have shown that the nonlinear hysteresis behaviors of the bending actuator are depended on the start values of the exciting electric field and the geometric parameters of the metallic layer. In addition, the numerical results have also shown that the thickness of metallic layer has little influence on the relative hysteresis, and the relationships between relative hysteresis Δd / ΔD and the driving electric field | Estart | are linear.
Vanadium oxide uncooled bolometer with gold black absorber of high long-wave-infrared-rays absorption has been fabricated and optimized. The fabrication processes for mirobolometer were developed with surface micromachining below 350°C. We evaluated gold black film reflectance by Fourier transform infrared spectroscopy. Low reflectance shows that gold black has good absorption at 8 to 14 μm infrared window. Detector tests show that a bolometer with gold black absorber, compared with the one without gold black, had better performance, with maximum responsivity and detectivity of 8.4×104 V/W and 6.16×108 cm Hz1/2/W, respectively, at 13 Hz chopper frequency and bias current 67 μA.
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