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Bo-Huei Liao
PhD at National Central Univ
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Publications (3)
Proceedings Article | 20 August 2010 Paper
Improving the optical and electrical properties of fluorine-doped tin oxide films by various post-annealing treatments
Proceedings Volume 7786, 77860Q (2010) https://doi.org/10.1117/12.860492
KEYWORDS: Transparent conductors, Annealing, Transmittance, Sputter deposition, Glasses, Fluorine, Metals, Tin, Oxygen, Thin films
Proceedings Article | 11 September 2007 Paper
Characterization of AlF3 thin films in the ultraviolet by magnetron sputtering of aluminum target
Proceedings Volume 6645, 66451X (2007) https://doi.org/10.1117/12.733550
KEYWORDS: Sputter deposition, Thin films, Refractive index, Aluminum, Transmittance, Ultraviolet radiation, Surface roughness, Chemical species, Fluorine, Carbon
Proceedings Article | 11 September 2007 Paper
The research of oblique deposition of lanthanum fluoride thin films at 193nm
Ming-Chung Liu, Bo-Huei Liao, Wen-Hao Cho, Cheng-Chung Lee, Cheng-Chung Jaing
Proceedings Volume 6645, 66451Y (2007) https://doi.org/10.1117/12.733616
KEYWORDS: Thin films, Birefringence, Refractive index, Neptunium, Lanthanum, Resistance, Scanning electron microscopy, Thin film deposition, Particles, Deep ultraviolet
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