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Dr. Bojja Aditya Reddy
at imec
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Publications (1)
Proceedings Article | 12 November 2024 Presentation + Paper
A study on programmed defect propagation from design to mask to wafer using SEM metrology
Balakumar Baskaran, Mohamed Saib, Bojja Aditya Reddy, Matteo Beggiato, Mihir Gupta, Christophe Beral, Anne-Laure Charley, Gian Lorusso, Joost Bekaert, Philippe Leray
Proceedings Volume 13216, 132160Z (2024) https://doi.org/10.1117/12.3035709
KEYWORDS: Semiconducting wafers, Design, Scanning electron microscopy, Printing, Etching, Metrology, Matrices, Bridges, Extreme ultraviolet
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