Dr. Boris Vandewalle Profile

Dr. Boris Vandewalle

at imec

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Publications (2)

Proceedings Article | 18 March 2015 Paper

Impact of a SADP flow on the design and process for N10/N7 metal layers

W. Gillijns, S. M. Y. Sherazi, D. Trivkovic, B. Chava, B. Vandewalle, V. Gerousis, P. Raghavan, J. Ryckaert, K. Mercha, D. Verkest, G. McIntyre, K. Ronse

Proceedings Volume 9427, 942709 (2015) https://doi.org/10.1117/12.2085923

KEYWORDS: Metals, Photomasks, Semiconducting wafers, Lithography, Optical lithography, Standards development, Capacitance, Optical proximity correction, Scanning electron microscopy, Manufacturing

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Proceedings Article | 28 March 2014 Paper

Design technology co-optimization for a robust 10nm Metal1 solution for logic design and SRAM

Boris Vandewalle, Bharani Chava, Sushil Sakhare, Julien Ryckaert, Mircea Dusa

Proceedings Volume 9053, 90530Q (2014) https://doi.org/10.1117/12.2048079

KEYWORDS: Metals, Extreme ultraviolet lithography, Optical lithography, Etching, Extreme ultraviolet, Argon, Logic, Lithography, Computational lithography, Double patterning technology

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