Dr. Boris V. Yakshinskiy Profile

Dr. Boris V. Yakshinskiy

Postdoctoral fellow at Rutgers The State Univ of New Jersey

SPIE Involvement:

Author

Publications (10)

Proceedings Article | 21 March 2016 Paper

Helium ion beam lithography (HIBL) using HafSOx as the resist

Feixiang Luo, Viacheslav Manichev, Mengjun Li, Gavin Mitchson, Boris Yakshinskiy, Torgny Gustafsson, David Johnson, Eric Garfunkel

Proceedings Volume 9779, 977928 (2016) https://doi.org/10.1117/12.2219239

KEYWORDS: Ions, Helium, Electrons, Electron beam lithography, Line edge roughness, Monte Carlo methods, Ion beam lithography, Extreme ultraviolet lithography, Silicon, Scanning helium ion microscopy

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Proceedings Article | 8 April 2011 Paper

Interaction of benzene and toluene vapors with Ru(0001) surface: relevance to MLM contamination

B. Yakshinskiy, Q. Shen, R. Bartynski

Proceedings Volume 7969, 796922 (2011) https://doi.org/10.1117/12.879297

KEYWORDS: Carbon, Graphene, Ruthenium, Telescopic pixel displays, Molecules, Contamination, Scanning tunneling microscopy, Extreme ultraviolet, Temperature metrology, Extreme ultraviolet lithography

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Proceedings Article | 22 March 2010 Paper

Carbon film growth on model MLM cap layer: interaction of selected hydrocarbon vapor with Ru(10-10) surface

B. Yakshinskiy, R. Bartynski

Proceedings Volume 7636, 76360F (2010) https://doi.org/10.1117/12.846645

KEYWORDS: Carbon, Ruthenium, Telescopic pixel displays, Adsorption, Extreme ultraviolet lithography, Ions, Temperature metrology, Graphene, Extreme ultraviolet, Molecules

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Proceedings Article | 18 March 2009 Paper

Measuring the EUV-induced contamination rates of TiO2-capped multilayer optics by anticipated production-environment hydrocarbons

S. Hill, N. Faradzhev, C. Tarrio, T. Lucatorto, R. Bartynski, B. Yakshinskiy, T. Madey

Proceedings Volume 7271, 727113 (2009) https://doi.org/10.1117/12.814111

KEYWORDS: Contamination, Extreme ultraviolet lithography, Protactinium, Molecules, Extreme ultraviolet, Reflectivity, Carbon, Synchrotrons, Molecular interactions, Titanium dioxide

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Proceedings Article | 18 March 2009 Paper

Carbon film growth on model electron-irradiated MLM cap layer: interaction of benzene and MMA vapor with TiO2 surface

B. Yakshinskiy, S. Zalkind, R. Bartynski, R. Caudillo, T. Madey

Proceedings Volume 7271, 727110 (2009) https://doi.org/10.1117/12.814385

KEYWORDS: Carbon, Telescopic pixel displays, Adsorption, Extreme ultraviolet lithography, Molecules, Temperature metrology, Mirrors, Extreme ultraviolet, Photons, Titanium dioxide

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Proceedings Article | 15 April 2008 Paper

Photons, electrons, and acid yields in EUV photoresists: a progress report

Robert Brainard, Elsayed Hassanein, Juntao Li, Piyush Pathak, Brad Thiel, Franco Cerrina, Richard Moore, Miguel Rodriguez, Boris Yakshinskiy, Elena Loginova, Theodore Madey, Richard Matyi, Matt Malloy, Andrew Rudack, Patrick Naulleau, Andrea Wüest, Kim Dean

Proceedings Volume 6923, 692325 (2008) https://doi.org/10.1117/12.773869

KEYWORDS: Electrons, Photons, Quantum efficiency, Extreme ultraviolet, Polymers, Monte Carlo methods, Extreme ultraviolet lithography, Oscillators, Line width roughness, Electronics

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Proceedings Article | 21 March 2008 Paper

Radiation-induced defect formation and reactivity of model TiO2 capping layers with MMA: a comparison with Ru

B. Yakshinskiy, M. Hedhili, S. Zalkind, M. Chandhok, Theodore Madey

Proceedings Volume 6921, 692114 (2008) https://doi.org/10.1117/12.772798

KEYWORDS: Oxygen, Ruthenium, Carbon, Telescopic pixel displays, Adsorption, Extreme ultraviolet, Extreme ultraviolet lithography, Photons, Contamination, Titanium dioxide

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Proceedings Article | 21 March 2008 Paper

Surface phenomena related to degradation of EUV mirrors: interaction of ethyl alcohol with ruthenium surfaces

B. Yakshinskiy, Iwao Nishiyama, Andrea Wüest, Theodore Madey

Proceedings Volume 6921, 69213E (2008) https://doi.org/10.1117/12.774012

KEYWORDS: Bioalcohols, Ruthenium, Telescopic pixel displays, Carbon, Carbon monoxide, Extreme ultraviolet lithography, Chemistry, Mirrors, Adsorption, Extreme ultraviolet

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