Chih-Chung Wang
at National Taiwan Univ.
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 10 August 2023 Presentation + Paper
Proceedings Volume 12619, 126190I (2023) https://doi.org/10.1117/12.2673676
KEYWORDS: Singular value decomposition, Matrices, Near field, Silicon, Electromagnetism, Finite-difference time-domain method, Data analysis, Computer simulations, Reflection, Databases

Proceedings Article | 27 April 2023 Poster + Paper
Proceedings Volume 12496, 124962J (2023) https://doi.org/10.1117/12.2657818
KEYWORDS: Silicon, Electromagnetism, Reflectometry, Reflection, Finite-difference time-domain method, Reflectance spectroscopy, Semiconducting wafers, Etching

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