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Camille Xu
at ChangXin Memory Technologies, Inc.
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Publications (2)
Proceedings Article | 22 February 2021 Presentation + Paper
Assessment of stochastic fail rate using E-beam massive metrology
Wallace He, Camille Xu, Daniels Bae, Kunyuan Chen, Andy Lan, Richer Yang, Abdalmohsen Elmalk, Aiqin Jiang, Fuming Wang, Double Chung, Shane Su, Kuo-Feng Pao, Oliver Patterson, Sudharshanan Raghunathan, Marc Kea, Jason Liao
Proceedings Volume 11611, 116112B (2021) https://doi.org/10.1117/12.2584739
Proceedings Article | 23 March 2020 Paper
Proteus SMO for process window improvement
Kun-Yuan Chen, Andy Lan, Richer Yang, Jing Jing Liu, Ting Ting Xu, Cheng-Shuan Lin, Hua Ding, Chih-Jie Lee, Thuc Dam, Jianjun Jia
Proceedings Volume 11327, 1132711 (2020) https://doi.org/10.1117/12.2552230
KEYWORDS: Source mask optimization, Photomasks, Semiconducting wafers, Lithography, Nanoimprint lithography, Resolution enhancement technologies, Photovoltaics, Optical proximity correction, Optimization (mathematics), Scanning electron microscopy
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