Dr. Cecile Petitdidier Profile

Dr. Cecile Petitdidier

at Commissariat à l'Energie Atomique

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Publications (2)

Proceedings Article | 16 May 2007 Paper

Mechanical dynamical analysis of ultra thin resist films for microlithography applications

C. Petitdidier, R. Tiron, S. Derrough, C. Sourd, L. Koscianski, B. Mortini

Proceedings Volume 6591, 65910I (2007) https://doi.org/10.1117/12.724202

KEYWORDS: Glasses, Polymethylmethacrylate, Polymers, Temperature metrology, Thin films, Lithography, Silicon films, Polymer thin films, Silicon, Microelectronics

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Proceedings Article | 2 April 2007 Paper

Resist evaluation for contact hole patterning with thermal flow process

R. Tiron, C. Petitdidier, C. Sourd, D. De Simone, G. Cotti, E. Annoni, B. Mortini

Proceedings Volume 6519, 65193A (2007) https://doi.org/10.1117/12.711678

KEYWORDS: Photoresist processing, Temperature metrology, Critical dimension metrology, Polymers, Glasses, Lithography, Optical lithography, Signal attenuation, Resist chemistry, Chemical analysis

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