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Chad Rue
at Thermo Fisher Scientific Inc
SPIE Involvement:
Author
Publications (1)
Proceedings Article | 26 March 2019 Presentation + Paper
Gas-enhanced PFIB surface preparation enabled metrology and statistical analysis of 3D NAND devices
Micah Ledoux, James Clarke, Brett Avedisian, Chad Rue, Umesh Adiga, Mark Biedrzycki
Proceedings Volume 10959, 109590I (2019) https://doi.org/10.1117/12.2515069
KEYWORDS: Metrology, 3D metrology, Scanning electron microscopy, Statistical analysis, Etching, 3D image processing, 3D acquisition, Scanning transmission electron microscopy, Image processing, Shape analysis
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