Prof. Changqing Xie
at Institute of Microelectronics
SPIE Involvement:
Author
Publications (19)

SPIE Journal Paper | 26 June 2024
Shengchao Duan, Huiwen Xue, He Li, Changqing Xie, Lina Shi
OE, Vol. 63, Issue 06, 067105, (June 2024) https://doi.org/10.1117/12.10.1117/1.OE.63.6.067105
KEYWORDS: Molybdenum, Extreme ultraviolet, Silicon, Refractive index, Vacuum, Optical transmission, Metalenses, Optical engineering, Signal intensity, Imaging spectroscopy

SPIE Journal Paper | 21 December 2023
Jun Zheng, Jiebin Niu, Yilei Hua, Chuhao Yao, Hailiang Li, Changqing Xie
OE, Vol. 62, Issue 12, 125104, (December 2023) https://doi.org/10.1117/12.10.1117/1.OE.62.12.125104
KEYWORDS: Diffraction, Diffraction gratings, Optical gratings, Transmittance, Technetium, Signal intensity, Optical engineering, Optical vortices, Fabrication, Silicon

Proceedings Article | 19 March 2018 Paper
Bo Yu, Liping Wang, Hailiang Li, Yao Xie, Hui Wang, Haitao Zhang, Shun Yao, Yu Liu, Jie Yu, Chun Li, Changqing Xie, Chunshui Jin
Proceedings Volume 10583, 105831T (2018) https://doi.org/10.1117/12.2294479
KEYWORDS: Silicon, Multilayers, Reflectivity, Molybdenum, Extreme ultraviolet, Crystals, Sputter deposition, Argon, Ions, Extreme ultraviolet lithography

Proceedings Article | 19 September 2017 Presentation
Yilei Hua, Lina Shi, Hailiang Li, Changqing Xie
Proceedings Volume 10386, 103860P (2017) https://doi.org/10.1117/12.2272428
KEYWORDS: Diffraction gratings, X-rays, Diffraction, X-ray diffraction, Reflection, X-ray astronomy, Optical fabrication, Synchrotron radiation, Interferometers, Silicon

Proceedings Article | 23 August 2017 Presentation + Paper
Xiaoli Zhu, Lai Wei, Hailiang Li, Leifeng Cao, Changqing Xie
Proceedings Volume 10386, 103860Q (2017) https://doi.org/10.1117/12.2272803
KEYWORDS: Electron beam lithography, X-rays, Diffraction, Spectroscopy, Diffraction gratings, Lithography, X-ray lithography, X-ray diffraction, Gold

Showing 5 of 19 publications
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