Dr. Changwoo Lee Profile

Dr. Changwoo Lee

at Lam Research Corp

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Publications (2)

Proceedings Article | 20 March 2019 Presentation + Paper

Across-wafer sub-1 nm critical dimension uniformity control by etch tool correction

Changwoo Lee

Proceedings Volume 10963, 109630G (2019) https://doi.org/10.1117/12.2519383

KEYWORDS: Etching, Critical dimension metrology, Semiconducting wafers, Optical lithography, Extreme ultraviolet, Inspection, Data centers, Front end of line, Logic, Plasma etching

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Proceedings Article | 17 March 2015 Paper

Plasma etch challenges with new EUV lithography material introduction for patterning for MOL and BEOL

Changwoo Lee, Bhaskar Nagabhirava, Michael Goss, Peng Wang, Phil Friddle, Stafan Schmitz, Jian Wu, Richard Yang, Yann Mignot, Nouradine Rassoul, Bassem Hamieh, Genevieve Beique, Andre Labonte, Catherine Labelle, John Arnold, John Mucci

Proceedings Volume 9428, 94280A (2015) https://doi.org/10.1117/12.2087133

KEYWORDS: Etching, Line edge roughness, Optical lithography, Extreme ultraviolet, Plasma, Line width roughness, Plasma etching, Extreme ultraviolet lithography, Photomasks, Ions

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