Mr. ChengCheng Kuo Profile

ChengCheng Kuo

Principle Engineer at Taiwan Semiconductor Manufacturing Co Ltd

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Publications (2)

Proceedings Article | 16 March 2009 Paper

OPC segmentation: dilemma between degree-of-freedom and stability with some relieves

Y. P. Tang, J. H. Feng, M. H. Chih, C. K. Tsai, W. C. Huang, C. C. Kuo, R. G. Liu, H. T. Lin, Y. C. Ku

Proceedings Volume 7274, 72742G (2009) https://doi.org/10.1117/12.814907

KEYWORDS: Optical proximity correction, Image segmentation, Optical lithography, Resolution enhancement technologies, Lithographic illumination, Detection and tracking algorithms, Neodymium, Semiconductor manufacturing, Immersion lithography, Photomasks

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Proceedings Article | 12 May 2005 Paper

OPC modeling by genetic algorithm

W. Huang, C. Lai, B. Luo, C. Tsai, C. Tsay, C. Kuo, R. Liu, H. Lin, B. Lin

Proceedings Volume 5754, (2005) https://doi.org/10.1117/12.602096

KEYWORDS: Optical proximity correction, Lithography, Wafer-level optics, Genetic algorithms, Model-based design, Data modeling, Optimization (mathematics), Optical lithography, Photomasks, Semiconducting wafers

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