Chien-Tai Wu
at National Yang Ming Chiao Tung Univ.
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 24 April 2003 Paper
Proceedings Volume 5116, (2003) https://doi.org/10.1117/12.498920
KEYWORDS: Nickel, Microactuators, Electroplating, Actuators, 3D microstructuring, 3D modeling, Finite element methods, Convection, Copper, Mechanical engineering

Proceedings Article | 21 November 2001 Paper
Proceedings Volume 4592, (2001) https://doi.org/10.1117/12.449007
KEYWORDS: Microelectromechanical systems, Surface micromachining, Aluminum, Nickel, Scanning electron microscopy, Calibration, Mechanical engineering, Tantalum, Roads, Inspection

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