Mr. Chong Wang Profile

Chong Wang

at Beijing Superstring Academy of Memory Technology

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Publications (2)

Proceedings Article | 10 April 2024 Poster + Paper

Balancing mask manufacturability and image quality with inverse lithography: a study on variable fracture sizes

Fu Li, Yu Mu, Jingjing Fan, Chunlong Yu, Ruihua Liu, Song Sun, Chong Wang, Jiangliu Shi, Qingchen Cao

Proceedings Volume 12953, 1295310 (2024) https://doi.org/10.1117/12.3010071

KEYWORDS: Optical proximity correction, Manufacturing, Lithography, Image quality, Vestigial sideband modulation, Scanning electron microscopy, Critical dimension metrology, Image processing, Shape analysis, Compliance

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Proceedings Article | 21 November 2023 Poster + Paper

Rounded-corner aware OPC for convergency and lithography performance improving

Ruihua Liu, Fu Li, Chunlong Yu, Jingjing Fan, Yu Mu, Song Sun, Chong Wang, Jiangliu Shi, Qingchen Cao

Proceedings Volume 12751, 1275115 (2023) https://doi.org/10.1117/12.2686228

KEYWORDS: Optical proximity correction, Lithography, Photoresist processing, Reliability, Photoresist materials, Mask making, Manufacturing, Integrated circuits, Electron beams, Chip manufacturing

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