Dr. Christine E. Heckle Profile

Dr. Christine E. Heckle

Manager at Corning Incorporated

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Author

Publications (3)

Proceedings Article | 12 May 2005 Paper

Laser-induced birefringence in fused silica from polarized lasers

Ulrich Neukirch, Douglas Allan, Nicholas Borrelli, Christine Heckle, Michal Mlejnek, Johannes Moll, Charlene Smith

Proceedings Volume 5754, (2005) https://doi.org/10.1117/12.598741

KEYWORDS: Birefringence, Polarization, Silica, Glasses, Anisotropy, Data modeling, Laser induced damage, Excimer lasers, Wavefronts, Adaptive optics

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Proceedings Article | 16 June 2003 Paper

Measuring and tailoring CTE within ULE glass

Kenneth Hrdina, Bradford Ackerman, Andrew Fanning, Christine Heckle, David Jenne, W. Navan

Proceedings Volume 5037, (2003) https://doi.org/10.1117/12.484925

KEYWORDS: Glasses, Ultrasonics, Metrology, Interferometers, Photomasks, Interferometry, Extreme ultraviolet lithography, Spatial resolution, Refraction, Optical components

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Proceedings Article | 27 December 2002 Paper

Development of mask materials for EUVL

Christine Heckle, Kenneth Hrdina, Bradford Ackerman, David Navan

Proceedings Volume 4889, (2002) https://doi.org/10.1117/12.467778

KEYWORDS: Glasses, Extreme ultraviolet lithography, Extreme ultraviolet, Photomasks, Inspection, Silica, Metrology, Polarimetry, Titanium, Transmission electron microscopy

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