We report the design and manufacturing of a tunable VCSEL with an HCG MEMS mirror and an integrated detector oblique to the optical cavity for measuring output power without disturbing the laser cavity. This allows for a single laser device with integrated power monitoring capabilities that can be used in concert with external electronics to stabilize the power or monitor optical feedback of the device for sensing applications. The HCG tunable VCSEL is modified to incorporate a sacrificial layer capable of detecting light at the VCSEL’s operating wavelength. For the MEMS release process, the sacrificial layer is removed from the optical cavity defined by the VCSEL mirrors and active region. The release process is designed to create a cavern around the optical cavity and walls of such cavern are composed by sacrificial layer material. Thus, the sacrificial layer material is removed from the optical cavity, but is kept surrounding it. Light scattered at the interface semiconductor-air hits the cavern walls and modifies current through the MEMS terminals (Idet). Any change in VCSEL output power (Pout) is directly related to a change on Idet through MEMS terminal, creating a direct relationship of Pout vs. Idet. To the best of our knowledge, there is no previous report of a VCSEL with integrated oblique intracavity detector.
Polarization-sensitive optical coherence tomography (PS-OCT) is a non-destructive and three-dimensional imaging technique that can provide polarization properties, e.g., phase retardation and the optical axis, as well as architectural information similar to conventional OCT from the sample. In this study, we have developed a high-speed PS-OCT imaging engine by using a novel wavelength-swept laser light source based on a high-contrast grating vertical-cavity surface-emitting laser (HCG-VCSEL). Example PS-OCT imaging including the human fingernail junction, 3D plastic printing material, and the chicken breast tissue demonstrated the depth-resolved measurement of the multifunctional information of the sample with PS-OCT and HCG-VCSEL light source at an A-scan rate of 250 kHz.
We present a high-speed swept-source optical coherence tomography (SS-OCT) imaging system using an electrically pumped, micro-electromechanical-system (MEMS) tunable HCG-VCSEL operating at the 1060 nm wavelength regime. Comparing to existing MEMS VCSEL light sources for SS-OCT, a movable high-contrast grating (HCG) is used as the top mirror of the laser cavity, replacing the conventional distributed Bragg reflector mirror design. By applying a reverse bias voltage, the HCG mirror actuates downward toward the VCSEL cavity, changing the effective cavity length and resulting in wavelength tuning responses. The developed SS-OCT system allows an A-scan rate of 250 kHz, a detection sensitivity of 98 dB, and an axial imaging resolution of 22 µm (full-width at half-maximum (FWHM), in air). The A-scan rate can be further improved to 500 kHz if both the backward (long to short wavelength) and forward laser sweep are used. In the experimental setup, a dual-channel acquisition scheme was utilized to provide calibration of the OCT signal with a separate calibration interferometer. Volumetric imaging of the human fingernail/nail fold junction in vivo shows the feasibility of providing high-speed imaging of the tissue architectures. The MEMS tunable HCG-VCSEL light source can provide high-speed OCT imaging with a more compact light source footprint and potentially a lower cost
We report recent advances in electrically-pumped 1050 nm and 1550 nm micro-electro-mechanically-tunable verticalcavity surface emitting-lasers (MEMS-VCSELs). We demonstrate a single-mode, continuous, mechanical tuning range of 73 nm with high output power and low threshold current performance for the 1050 nm devices. To the best of our knowledge, 73 nm is a record tuning value for an electrically-pumped tunable VCSEL with a tuning speed >250 kHz, making them highly desirable for next generation OCT and other swept source applications. 10 Gbps 1550-nm DWDM tunable SFP+ modules based on an HCG-VCSEL are demonstrated with an embedded communications channel for automatic wavelength tuning and locking for low cost FTTx and front haul network applications.
We demonstrate wavelength-tunable VCSELs using high contrast gratings (HCGs) as the top output mirror on VCSELs, operating at 1550 nm. Tunable HCG VCSELs with a ~25 nm mechanical tuning range as well as VCSELs with 2 mW output power were realized. Error-free operation of an optical link using directly-modulated tunable HCG VCSELs transmitting at 1.25 Gbps over 18 channels spaced by 100 GHz and transmitted over 20 km of single mode fiber is demonstrated, showing the suitability of the HCG tunable VCSEL as a low cost source for WDM communications systems.
We demonstrate wavelength-tunable SFF transceivers operating at 1550 nm using a tunable VCSEL with a high contrast grating (HCG) as the output mirror. Tunable HCG VCSELs with a ~25 nm mechanical tuning range and over 2 mW output power were realized. Error-free operation of an optical link using directly-modulated tunable HCG VCSELs transmitting at 1.25 Gbps over 18 channels spaced by 100 GHz and transmitted over 20 km of single mode fiber is demonstrated, showing the suitability of the HCG tunable VCSEL as a low cost source for next generation DWDM communications systems in access networks and data centers.
We present a novel form of hollow-core waveguiding that enables chip-scale integration. Light propagates in air along a
zig-zag path between very highly-reflective Si metastructures comprised of a single layer of sub-wavelength high-contrast
gratings (HCGs) without the aid of sidewalls. Top and bottom subwavelength HCGs separated by 9um of air
and with periodicity perpendicular to the propagation of light reflect light at shallow angles with extremely low loss.
The HCGs are patterned on SOI wafers with 340 nm-thick Si device layers engraved in a single etch step, and have been
measured to have a 0.37 dB/cm propagation loss. Our work demonstrates the light-guiding properties of HCG hollow-core
waveguides with a novel form of lateral beam confinement that uses subtle reflection phase changes between core
and cladding HCG regions capable of bending light around 30 mm radius-of-curvature tracks.
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