Precise air-bearing motion table is widely used in the lithography machine and other semiconductor manufacturing
equipments. In this paper, a high performance H-type air-bearing XY motion table driven by linear motors was
introduced and its positioning error measuring, modeling and compensation were studied. Firstly, the main error sources
and types of the motion table were analyzed. Secondly, applying laser-vector-measurement technique, positioning errors
in the X and Y directions were measured by laser interferometer. Then the composite error models of three linear motors
in the H-type stage were built by different methods, including piecewise linear models, B-spline curve models and
artificial nerve network models. According to the structure characteristic, the difference between the one-dimension
(1-D) and two-dimension (2-D) error model and compensation effect were studied. Lastly, some error compensation
experiments were carried out based on different error models. The experimental results show that positioning error in X
and Y directions were decreased to less than 1µm through error correction, which can fulfill the micron level precision
requirement in industry, the B-spline model and BP nerve network model had better error forecast ability than the
piecewise linear model, and the 2-Derror model has better compensation effect than 1-D model.
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