Mr. Corey R. Struck Profile

Corey R. Struck

at Univ of Illinois

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Author

Publications (2)

Proceedings Article | 1 April 2009 Paper

Reducing LER using a grazing incidence ion beam

C. R. M. Struck, R. Raju, M. J Neumann, D. N. Ruzic

Proceedings Volume 7273, 727346 (2009) https://doi.org/10.1117/12.814263

KEYWORDS: Line width roughness, Line edge roughness, Photoresist materials, Ions, Ion beams, Sputter deposition, Scanning electron microscopy, Image processing, Argon, Semiconductors

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Proceedings Article | 4 December 2008 Paper

Grazing incidence ion beams for reducing LER

C. Struck, M. Neumann, R. Raju, R. Bristol, D. Ruzic

Proceedings Volume 7140, 71402P (2008) https://doi.org/10.1117/12.804692

KEYWORDS: Line edge roughness, Photoresist materials, Line width roughness, Scanning electron microscopy, Ions, Argon, Ion beams, Grazing incidence, Semiconductors, Sputter deposition

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