Dr. Daniel Bratton Profile

Dr. Daniel Bratton

at Cornell Univ

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Publications (2)

Proceedings Article | 29 March 2006 Paper

Molecular glass resists for next generation lithography

Daniel Bratton, Ramakrishnan Ayothi, Nelson Felix, Heidi Cao, Hai Deng, Christopher Ober

Proceedings Volume 6153, 61531D (2006) https://doi.org/10.1117/12.656630

KEYWORDS: Glasses, Lithography, Bridges, Electron beam lithography, Extreme ultraviolet lithography, Extreme ultraviolet, Semiconducting wafers, Line edge roughness, Magnesium, FT-IR spectroscopy

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Proceedings Article | 4 May 2005 Paper

Materials for future lithography

Seung Wook Chang, Da Yang, Junyan Dai, Nelson Felix, Daniel Bratton, Kousuke Tsuchiya, Young-Je Kwark, Juan-Pablo Bravo-Vasquez, Christopher Ober, Heidi Cao, Hai Deng

Proceedings Volume 5753, (2005) https://doi.org/10.1117/12.607235

KEYWORDS: Glasses, Line edge roughness, Extreme ultraviolet lithography, Electron beam lithography, Lithography, Extreme ultraviolet, Polymers, Silicon, Chemical elements, Molecules

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