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Dan Rodier
Technology Development Manager at Particle Measuring Systems Inc
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Publications (4)
Proceedings Article | 15 October 2012 Paper
Next generation nano-contamination monitoring
Steven Kochevar, Thomas Pietrykowski, Dan Rodier
Proceedings Volume 8492, 84920H (2012) https://doi.org/10.1117/12.928996
KEYWORDS: Particles, Nanoparticles, Atmospheric particles, Light scattering, Aerosols, Sensors, Capillaries, Laser optics, Nanotechnology
Proceedings Article | 11 May 2009 Paper
Airborne molecular contamination detection method for photomasks and ultra purging decontamination
Hisanori Kambara, Arnaud Favre, Magali Davenet, Dan Rodier
Proceedings Volume 7379, 73791G (2009) https://doi.org/10.1117/12.824293
KEYWORDS: Photomasks, Air contamination, Contamination, Pellicles, Crystals, Inspection, Ions, Reticles, Semiconducting wafers, Semiconductors
Proceedings Article | 5 April 2007 Paper
Monitoring airborne molecular contamination: a quantitative and qualitative comparison of real-time and grab-sampling techniques
Proceedings Volume 6518, 65183Z (2007) https://doi.org/10.1117/12.707776
KEYWORDS: Liquids, Sulfur, Particles, Statistical analysis, Ions, Particle systems, Contamination, Standards development, Calibration, Error analysis
Proceedings Article | 5 April 2007 Paper
Optimized molecular contamination monitoring for lithography
Proceedings Volume 6518, 651844 (2007) https://doi.org/10.1117/12.712315
KEYWORDS: Contamination, Ions, Lithography, Ionization, Environmental monitoring, Statistical analysis, Error analysis, Calibration, Environmental sensing, Pollution control
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