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Dr. Deepkishore Mukhopadhyay
Advanced Research Engineer at Bruker AFM Probes
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Author
Publications (4)
Proceedings Article | 15 October 2012 Paper
Temporal modulation of synchrotron x-rays using torsional MEMS mirrors
Proceedings Volume 8502, 85020H (2012) https://doi.org/10.1117/12.930057
KEYWORDS: X-rays, Mirrors, Modulation, Micromirrors, Microelectromechanical systems, Reflectivity, Synchrotrons, Sensors, Measurement devices, Control systems
Proceedings Article | 16 February 2012 Paper
Self-sustained oscillation of MEMS torsional micromirrors
Proceedings Volume 8252, 82520W (2012) https://doi.org/10.1117/12.906746
KEYWORDS: Micromirrors, Amplifiers, Signal detection, Microelectromechanical systems, Atmospheric optics, Linear filtering, Capacitance, X-rays, Mirrors, Oscillators
Proceedings Article | 26 February 2008 Paper
Parallel-kinematic-mechanism-based monolithic XY micropositioning stage with rotary comb drive actuators
Proceedings Volume 6882, 688209 (2008) https://doi.org/10.1117/12.762358
KEYWORDS: Kinematics, Actuators, Silicon, Aluminum, Etching, Fabrication, Finite element methods, Sensors, Optical lithography, Plasma
Proceedings Article | 1 July 2005 Paper
Development of a novel piezo-driven parallel-kinematics single crystal silicon micropositioning XY stage
Proceedings Volume 5836, (2005) https://doi.org/10.1117/12.605632
KEYWORDS: Kinematics, Actuators, Silicon, Semiconducting wafers, Crystals, Metals, Sensors, Silica, Photomasks, Microfabrication
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