Dr. Denis Georgievich Kachalov Profile

Dr. Denis Georgievich Kachalov

at Samara State Aerospace Univ

SPIE Involvement:

Author

Publications (3)

Proceedings Article | 14 May 2010 Paper

Stochastic optimization of radial DOE forming intensity distribution along an axial focal zone

D. Kachalov, V. Pavelyev, S. Khonina, R. Skidanov, O. Yu. Moiseev

Proceedings Volume 7717, 77170E (2010) https://doi.org/10.1117/12.854870

KEYWORDS: Diffractive optical elements, Binary data, Stochastic processes, Optical components, Axicons, Genetics, Genetic algorithms, Optical design, Diffraction, Quantization

Read Abstract +

Proceedings Article | 13 May 2010 Paper

Novel approach for manufacturing of continuously shaped diffractive optical elements

Vladimir Pavelyev, Yuri Miklyaev, Waleri Imgrunt, Maxim Bolshakov, Denis Kachalov, Victor Soifer, Lutz Aschke, Vitaly Lissotschenko

Proceedings Volume 7716, 77161N (2010) https://doi.org/10.1117/12.854836

KEYWORDS: Beam splitters, Diffractive optical elements, Optics manufacturing, Lithographic illumination, Optical design, Diffraction gratings, Optical components, Manufacturing, Micro optics, Lithography

Read Abstract +

Optical lithography with its 193nm technology is pushed to reach and shift its limits even further. There is strong demand on innovations in illumination part of exposure tools. Current illumination systems consisting of diffractive and refractive optical elements offer numerous benefits such as optimized laser beam shape with high homogeneity and high numerical aperture enabling high efficiency. LIMO's unique production technology is capable to manufacture free form surfaces on monolithic arrays larger than 250mm with high precision and reproducibility. Different kinds of intensity distributions with best uniformities or customized profiles have been achieved by using LIMO's refractive optical elements. Recently LIMO pushed the limits of this lens production technology and was able to manufacture first diffractive optical elements (DOE) based on continuous relief's profile. Beside for the illumination devices in lithography, DOEs find wide use in optical devices for other technological applications, such as optical communications and data processing. Up to now DOE designs follow the principle of phase diffraction gratings. Its diffraction structure with a periodic phase profile performs a superposition of beams with predefined energy ratios. Due to the application for high precise laser-beam shaping and beam splitting in optical technologies and optical fiber networks, number of grating orders is increased up to some tens or even hundreds. Classic lithographic technologies lead to quantized (step-like) profiles of diffractive micro-reliefs, which causes a decrease of beam splitter's diffractive efficiency. The newest development of LIMO's microlens fabrication technology allows us to make a step from free programmable microlens profiles to diffractive optical elements with high efficiency. Our first results of this approach are demonstrated in this paper. Diffractive beam splitters are presented. A special mathematical method is used to design diffractive optical elements with continuous surface profiles. Comparison between theoretical simulations and experimental results shows very good correlation.

Proceedings Article | 4 March 2010 Paper

Novel continuously shaped diffractive optical elements enable high efficiency beam shaping

Yuri Miklyaev, Waleri Imgrunt, Vladimir Pavelyev, Denis Kachalov, Tanja Bizjak, Lutz Aschke, Vitalij Lissotschenko

Proceedings Volume 7640, 764024 (2010) https://doi.org/10.1117/12.846573

KEYWORDS: Beam splitters, Diffractive optical elements, Manufacturing, Beam shaping, Optics manufacturing, Optical components, Lithographic illumination, Micro optics, Diffraction gratings, Lithography

Read Abstract +

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years