An evanescent field sensing platform is being pursued through excitation of cladding modes using long-period (LPGs)
inscribed in an endlessly single-mode photonic crystal fiber (ESM PCF) by CO2 laser irradiation. Core-cladding mode
coupling and recoupling has resulted in significant improvement in the evanescent field overlap throughout the cladding
air channels in the PCF-LPG, compared to the PCF alone. Our numerical simulation has shown that design optimization
of the PCF-LPG configuration can lead to a field power overlap as high as 23% with a confinement loss of less than 1
dB/m in the cladding mode.
For applications in ultra-large scale integration, low pressure, high density plasmas are being developed for etching and deposition of thin films. To control critical parameters such as the flux and energy distribution of ions impacting surfaces, it is necessary to understand how these parameters are influenced by physical and electromagnetic design. In this work, we report measurements of ion velocity distributions in Ar/He and Cl2/He electron cyclotron resonance plasmas. Using Doppler-shifted laser-induced fluorescence spectroscopy, we measure metastable Ar and Cl ion velocity distributions parallel and perpendicular to the magnetic field as a function of magnetic field amplitude, pressure, and microwave power. We also examine the effects of the wafer platen on the distribution functions by repeating the measurements after removing the platen. We find nearly isotropic ion velocity distributions when the source is operated as a magnetic mirror and the He partial pressure is low; higher He pressures tend to cool the parallel velocity distribution. Downstream, we consistently observe bimodal ion velocity distributions: the fast component, created in the source, follows magnetic flux lines into the reactor; the slow component, created mostly where the plasma expands from the source into the reaction chamber, is more isotropic. The relative amplitudes of these two components, the average ion energy, and the ion energy distribution are easily controlled by changing pressure and magnetic field.
Conference Committee Involvement (12)
Fiber Optic Sensors and Applications XVI
16 April 2019 | Baltimore, MD, United States
Fiber Optic Sensors and Applications XV
17 April 2018 | Orlando, FL, United States
Fiber Optic Sensors and Applications XIV
11 April 2017 | Anaheim, CA, United States
Fiber Optic Sensors and Applications XIII
18 April 2016 | Baltimore, MD, United States
Fiber Optic Sensors and Applications XII
22 April 2015 | Baltimore, MD, United States
Fiber Optic Sensors and Applications XI
8 May 2014 | Baltimore, MD, United States
Fiber Optic Sensors and Applications X
2 May 2013 | Baltimore, Maryland, United States
Fiber Optic Sensors and Applications IX
26 April 2012 | Baltimore, Maryland, United States
Fiber Optic Sensors and Applications VIII
28 April 2011 | Orlando, Florida, United States
Fiber Optic Sensors and Applications VII
7 April 2010 | Orlando, Florida, United States
Fiber Optic Sensors and Applications VI
15 April 2009 | Orlando, Florida, United States
Photonic Crystals and Photonic Crystal Fibers for Sensing Applications III
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