Mr. Dmitri Lapanik Profile

Dmitri Lapanik

Senior CAD Engineer

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Publications (2)

Proceedings Article | 20 October 2006 Paper

A fresh look at the cell-wise process effect corrections

Dmitri Lapanik

Proceedings Volume 6349, 63491R (2006) https://doi.org/10.1117/12.688731

KEYWORDS: Scattering, Optical proximity correction, Error analysis, Transistors, Metals, Algorithm development, Systems modeling, Design for manufacturing, Semiconducting wafers, Wafer-level optics

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Proceedings Article | 20 May 2006 Paper

Simultaneous layout, process, and model optimization within an integrated design-for-yield environment

Dmitri Lapanik, Lynn Cai, Chung-Shin Kang, Bob Naber, Jason Sweis, Wolf Staud

Proceedings Volume 6283, 62832S (2006) https://doi.org/10.1117/12.681806

KEYWORDS: Process modeling, Optimization (mathematics), Resolution enhancement technologies, Manufacturing, Optical proximity correction, Photomasks, Calibration, Image processing, Semiconducting wafers, Systems modeling

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