Dr. Dmitry A. Belousov
at Institute of Automation and Electrometry of the SB RAS
SPIE Involvement:
Author
Publications (11)

Proceedings Article | 27 November 2024 Paper
Roman Kuts, Victor Korolkov, Dmitrij Belousov, Alaxander Sametov, Anatoly Malyshev
Proceedings Volume 13237, 132370U (2024) https://doi.org/10.1117/12.3036032
KEYWORDS: Computer generated holography, Holograms, Reflection, Wavefronts, Diffraction, Holographic interferometry, Interferograms, Holographic interferometers, Fizeau interferometers, Manufacturing

Proceedings Article | 23 November 2024 Poster + Paper
Proceedings Volume 13240, 1324024 (2024) https://doi.org/10.1117/12.3036016
KEYWORDS: Diffraction, Diffractive optical elements, Laser systems engineering, Sensors, Algorithm development, Optics manufacturing, Chemical elements, Laser beam diagnostics, Control systems, Error analysis

Proceedings Article | 23 November 2024 Poster + Paper
Proceedings Volume 13240, 1324023 (2024) https://doi.org/10.1117/12.3036007
KEYWORDS: Reflection, Etching, Silicon, Chromium, Film thickness, Metals, Silicon films, Photomasks, Laser applications, Zirconium

Proceedings Article | 27 November 2023 Poster + Paper
Proceedings Volume 12762, 127620W (2023) https://doi.org/10.1117/12.2687545
KEYWORDS: Chromium, Silicon, Etching, Reflectivity, Silicon films, Multiphoton lithography, Laser applications, Film thickness, Amorphous silicon, Computer generated holography, Diffractive optical elements, Direct write lithography, Nanostructured thin films, Laser microstructuring

Proceedings Article | 19 December 2022 Poster + Presentation + Paper
Proceedings Volume 12318, 123182G (2022) https://doi.org/10.1117/12.2643720
KEYWORDS: Photoresist materials, Diffraction, Tolerancing, Diffraction gratings, Multiphoton lithography, Photomasks, Statistical analysis, Process control, Glasses, Distortion

Showing 5 of 11 publications
SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Advertisement
Advertisement
Back to Top